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4" wafer Borosilicate glass (Pyrex or Borofloat)
Diameter 100 +/-0.3mm
Thickness: 500 +-25um / Also have 175 +/-25um
Double Side Polish
Surface Roughness: <1.5nm (Ra)
TTV: <10um
ground c-shape edge with primary flat acc.to SEMI
surface cleanness: scratch-dig 60-40 according to MIL-PRF-13830
clear apeture: diameter 90nm
cleanroom packed class 1000 according Fed 209
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