AIRCO TEMESCAL HRS 2550 SPUTTERING SYSTEM
3 TARGETS
AUTO/MANUAL VALVING
DIRECT DRIVE MECHANICAL PUMP
DIFFUSION PUMP
CAN BE UPGRADED WITH ROTATING FIXTURE TO HOLD (4) 8" WAFERS
CV 14, 14kw electron beam power supply choose diffusion or cryopump choose single pocket, 4 pocket or 6 pocket electron beam gun.