Aluminum on Sapphire (AlN) Wafer

university wafer substrates

How We Help Researchers

Below is a typical question from a university researcher.

I am interested in these AIN on Sapphire wafers. As I searched, I did not find much about it. Could you give me some introduction about AIN, like what it is exactly, what kind of applications on AIN on Sapphire?

UniversityWafer, Inc. Responded.

Pls see below for simple description

"It is UV grade aluminum nitride on C-plane sapphire. The UV Grade Aluminum Nitride Template with nominal AlN thickness from 25nm to 6um, front side surface Epi-ready for UVA,UVB & UVC applications,also as a buffer layer between substrate and GaN layer etc. "

Any other questions pls feel free contact us. Reference #246809.

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What electronic devices use Aluminum Nitride on Sapphire?

Below are some semiconductor devices that use aluminum nitride (AlN) templates on sapphire substrates.  

High electron mobility transistors (HEMTs): These are a type of transistor that uses AlN as the gate dielectric and are used in a variety of high-frequency electronic devices, such as radar systems, satellite communication systems, and cell phone base stations.

Lasers: AlN templates on sapphire to fabricate laser diodes for various applications, including data storage, fiber optic communication, and biomedical imaging.

Photodetectors: AlN templates on sapphire fabricate photodetectors, devices that convert light into an electrical signal used in various applications, including imaging, sensing, and communication.

High-voltage devices: The high breakdown voltage of AlN makes it useful for high-voltage applications, such as in high-voltage power electronics.

Other electronic devices:  Industry uses of AlN templates on sapphire include the fabrication of different types of electronic devices, such as filters, oscillators, and resonators.

 

Researching Aluminum Nitride Template on Sapphire Wafers

Academic researchers studying materials science, electrical engineering, and physics, use aluminum nitride on sapphire. Researchers who study electronic devices, such as transistors and lasers, often use AlN templates on sapphire substrates. Additionally, researchers in the field of materials science may be interested in studying the properties of AlN and its potential uses, including as a template on sapphire. Finally, researchers in physics may be interested in using AlN templates on sapphire to study the fundamental properties of electronic devices and materials.

Aluminum nitride (AlN) deposited onto sapphire substrates have been used o fabricate electronic devices such as high electron mobility transistors (HEMTs) and lasers.

A Ph.d candidate from a large university requested the following:

Can you send me a quote for epitaxial AlN templates on 2" or 4" sapphire and Si substrates; Can you include the surface roughness and the quality of the films in terms of omega scans of the (0002) reflection? 

UniversityWafer, Inc. Quoted:

Pls see below in stock AlN template from our in stock.

  1. 1. 100nm epitaxial AlN templates on 2" sapphire substrate,high quality epitaxial and relaxed AlN film with low surface roughness </=0.5nm,Qty. 2pcs
  2. 25nm epitaxial AlN templates on 2" Si substrate,high quality epitaxial and relaxed AlN film with low surface roughness </=0.5nm,Qty. 2pcs

See attached for the omega scans of the (0002) reflection while the AlN template @ 5.5um thickness,We just record this thick AlN XRD rocking curve

Reference #256078 scans and pricing.

Below are just some of the AlN on Sapphire wafers that we have in stock.

Undoped SI Doped AlN-on-Sapphire Wafer Series UV Grade Aluminum Nitride on C-plane SSP Sapphire

Dia
Orient. wafer thick Pol AlN Template Thickness Conduction Type Grade
2" <0001> 430+/-25um SSP 25nm  Un-doped,SI-type Prime
2" (001)/<0001> 430+/-25um SSP 100nm  Un-doped,SI-type Prime
2" (001)/<0001> 430+/-25um DSP 100nm  Un-doped,SI-type Prime
2" (001)/<0001> 430+/-25um SSP 350nm Un-doped,SI-type Prime
2" (001)/<0001> 430+/-25um SSP 500nm Un-doped,SI-type Prime
2" (001)/<0001> 430+/-25um SSP 1.0um Un-doped,SI-type Prime
2" (001)/<0001> 430+/-25um SSP 4-5um Un-doped,SI-type Prime
/            
4" <0001> 650+/-25um SSP 25nm  Un-doped,SI-type Prime
4" (001)/<0001> 650+/-25um SSP 100nm  Un-doped,SI-type Prime
4" (001)/<0001> 650+/-25um SSP 350nm Un-doped,SI-type Prime
4" (001)/<0001> 650+/-25um SSP 500nm Un-doped,SI-type Prime
4 (001)/<0001> 650+/-25um SSP 1.0um Un-doped,SI-type Prime
/            
6" <0001> 1000+/-25um SSP 25nm  Un-doped,SI-type Prime
6" (001)/<0001> 650+/-25um SSP 100nm  Un-doped,SI-type Prime
6" (001)/<0001> 650+/-25um SSP 350nm Un-doped,SI-type Prime
6" (001)/<0001> 650+/-25um SSP 500nm Un-doped,SI-type Prime
6" (001)/<0001> 650+/-25um SSP 1.0um Un-doped,SI-type Prime
  1. Do custom AlN wafers upon request from 2'' ~ 6''
  2. P/E : Single side polished 
  3. P/P : Both sides polished
  4. TBD by qty.: Pricing According to the quantity
  5. Wafer Grade: Prime grade,Epi-ready or As-grown
  6. Template thickness uniformity: < 10%
  7. Template Resistivity: > 106 Ohm-cm

Aluminum Nitride Template on Sapphire

AlN-on-Silicon Wafer Series Prime grade/For HEMT
Diameter Orient. Thick Pol AlN Template Thickness Conduction Type Grade
2'' (001)/(111) Std SSP 25nm  Un-doped,SI-type Prime
4'' (001)/(111) Std SSP 25nm  Un-doped,SI-type Prime
6'' (001)/(111) Std SSP 25nm  Un-doped,SI-type Prime
8'' (001)/(111) Std SSP 25nm  Un-doped,SI-type Prime
6'' (001)/(111) Std SSP 100nm  Un-doped,SI-type Prime
6'' (001)/(111) Std SSP 150nm  Un-doped,SI-type Prime
6'' (001)/(111) Std SSP 200nm  Un-doped,SI-type Prime