Substrates Used for Waveguide Development

I am graduate student from Caltech and I am wondering if your company could provide us with Flame hydrolysis Deposition (FHD) of Silicon Oxide wafer. We also want the FHD oxide doped with Germanium or Boron, or Phosphorus. Our wafer is to be used for making silica waveguide. The wafer size we want is 3 inch. Oxide layer thickness is 2um. Look forward to your reply.

I would require a quotation for SOI Wafers, I plan on using them for
Lithography to produce Waveguides for the telecommunication wavelength regime of 1500nm.

Wafers suitable for my purpose should have the following criteria:

• Top Si Thickness between 200nm and 300nm
• Buried Oxide Thickness between 2000nm and 3000nm
• Total Wafer diameter up to 150mm

Please let me know if you have any suitable wafers currently in stock
and inform me about the quantity, pricing, shipping cost and delivery
time.

I would require a quotation for SOI Wafers, I plan on using them for
Lithography to produce Waveguides for the telecommunication wavelength regime of 1500nm.

Wafers suitable for my purpose should have the following criteria:

- Top Si Thickness between 200nm and 300nm
- Buried Oxide Thickness between 2000nm and 3000nm
- Total Wafer diameter up to 150mm

Please let me know if you have any suitable wafers currently in stock
and inform me about the quantity, pricing, shipping cost and delivery
time.

I would like to check the price range of 125um thickness intrinsic double side polished(two-side) Si wafer. Could you please provide a price list depending on the size of substrate, please?

Thank you so much for your very quick reply! I could see many intrinsic Si wafers and don't know what would be the best. Previously one of my previous collegues ordered 50um double side polished Si wafer with Purchase order number: 17708. I would like to order similar ones with 125um thickness.

I would like to use it for making waveguides on the top of the substrate so the surface should be flat and I would prefer intrinsic. However, I don't have any idea about which orientation should be and whether PE or PP would be better. Concernning the size of the wafer, bigger size is better for us if the price is extremely high compared with smaller wafer. That's why I would like to know price range. It would be very much appreciated if you could help or suggest an ideal substrate for my study.

I am interested in using thermal oxide as an undercladding for polymeric waveguide fabrication.  I would like the oxide to be as thick
as possible and flat on top with a 2" diameter, but the other parameters are relatively immaterial.  Can you please give me a quote for this?

I would like to make an enquiry about a silicon wafer with the following properties:

Doping: intrinsic (undoped)
Diameter: 100 mm
Thickness: > 300 um
Thermal oxide thickness: >= 2 um

I would like 5 wafers each with a top oxide (SiO2) side of the wafer to be polished if possible (single side polished). I checked the list of wafers you provided in the other email and I found item # C271 may be suitable for our application providing that an SiO2 oxide can be grown on top at least 3 um thick. Resistivity can be between 0 to 100 ohm/cm but any value will be fine as we plan to use this wafer as a substrate for optical waveguides.

Do you happen to have any wafers with similar specifications?

I'm interested in your fused silica wafers for use as a deep-uv waveguide.  Do you know what the source of the silica was? Either what the manufacturer/type was, or whether it was produced with flame hydrolysis or from silica sand?  If you have any uv transmittance data, that would help too. 

I'd also be interested in any thinner fused silica wafers that may be available.

Fused Silica Wafer
6", 1mm thick, SSP
Refractive index 1.445 at 1550nm, no/low birenfringence, flatness of semiconductor

We received your SOI inventory list. As we intend to process waveguide structures in the top Si layer, bonded SOI wafers with a top Si thickness variation of 500 nm are generally not suitable for this purpose.

We are also interested in Simox with a top Si/Box thickness > 190 / 375 nm, if available. The top Si uniformity should be <= 10 nm.

Hi Looking to submit a bid where we intend to use SOI- we need to form single mode waveguides for 1.5um  and would require differing lengths ie 3, 5, 8 and 10mm.  In total I suspect we woudl need around 20 pieces in total.  What I am looking for is a budgetary price that could be inserted into the bid. 

We are interested in the 2nd row of “Monolayer Graphene Your Substrate” for this moment. I would like to prepare several samples for your transfer monolayer graphene. May I ask several questions as below?

Question 1
What kind of surface you could manage to do graphene transfer? Only flat top surface or also ok for that with sub-micrometer waveguides (waveguides have around 300nm step, would the side wall also can be covered with graphene). If there are 220nm height waveguides, I assume it’s also ok. I’m wondering if the side wall of the waveguides are also with good touched with graphene? For this kind of transfer you might use wet transfer?

Answer 1
We can make the transfer on waveguides, but preferably if it is of 200nm.

Question 2
Could you provide Raman spectra data for graphene before transfer and after transfer? Or what other test data you could provide for inspecting the quality of graphene?   I don’t think optical microscope would be enough to inspect the optical quality of transferred graphene. It may show that the transferred graphene is complete or broken, but can’t say is the monolayer graphene be contaminated or with properties destroyed. Because I’ve done a lot of graphene experiments, the graphene might be good through microscope view or SEM check, but it might give bad Raman spectra which is really saying transferred graphene is still good monolayer graphene or not.  So I’m wondering if I ask both Raman check before and after graphene transfer, would you delivery graphene ONLY with good Raman spectra? Or you don’t care how is it the Raman spectra, just judge from the microscope?  It the 100 dollars higher for both raman check before and after?

Answer 2
To inspect the quality we use optical microscope. If you want Raman analysis, the cost will be higher.