Substrates for Photo-Imageable Fluoropolymers
An associate chemist requested a quote for the following:
Were interested in any (we typically buy item #447) 3” Si wafer with a 1-4um layer of Cu on top. The middle layer of a thermal oxide is okay with us. Wed also like to explore etching the Cu down to the Si layer in a pattern if that is feasible. Please advise on cost and capabilities.
Reference #252329 for specs and pricing.
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150mm Silicon Wafers for Fluropolymer Thin Film Deposition
The head of research & development of a small high-tech company requested a quote for the following:
Perhaps you can suggest a Si wafer type for me. I am coating the wafers using Plasma Enhanced Chemical Vapor Deposition (PECVD). My research covers several areas of organic, fluoropolymer and siloxane thin film deposition, but my group uses the wafers to examine our coatings via ellipsometry, spectral reflectance, surface free energy (liquid contact angle), XPS and occasionally SEM and AFM. We need diced wafers (10 x 10mm) so we can coat and analyze using these techniques. We need diced wafers, 6" wafer, diced into 10x10mm rectangles, SSP (QTY 25)
Typically customers bring 6” wafers to me and we attempts to dice (break) them ourselves into smaller pcs. I would like to standardize on a Si wafer type to dice. Can you suggest a few wafer types we could have diced by you?
We believe Item #B252 is the best option as the other item #Z206 because p-type resistivity of 0.001 Ohm-cm, implies 0.63% Boron content. That is such a large concentration of Boron that it may interfere with your measurements. Let me suggest using Silicon wafers with Ro>1 Ohmcm.
Thus we shall prepare a quote using item #B252 {with Phosphorus content < 0.1ppma}.
Reference #204666 for specs and pricing.
How are Fluoropolymers used in the Semiconductor Industry?
In the semiconductor industry, fluoropolymers play a crucial role in various applications due to their unique combination of properties, including their chemical resistance, high purity, and excellent electrical characteristics. Here's how fluoropolymers are used in the semiconductor industry:
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Chemical Delivery Systems: Fluoropolymers are often used in the tubes, pipes, and containers that transport and store aggressive and reactive chemicals. These chemicals are used for etching and cleaning semiconductor wafers. Given the high chemical resistance of fluoropolymers, they ensure that the chemicals don't react with the containment or delivery systems, thus maintaining the purity of the chemicals.
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Wet Bench Construction: "Wet benches" are where semiconductor wafers are cleaned, etched, and rinsed. Due to their resistance to a wide range of chemicals, fluoropolymers are used to fabricate parts of these wet benches, especially those that come into direct contact with the chemicals.
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Insulation for Wires and Cables: The excellent electrical insulating properties of fluoropolymers make them suitable for insulating wires and cables used in semiconductor manufacturing equipment.
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Photolithography: Some advanced lithographic techniques in semiconductor manufacturing require materials with specific optical properties. Fluoropolymers, in certain cases, have been used or investigated for such purposes, especially for immersion lithography processes.
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Wafer Carriers and Cassettes: Components that hold and transport wafers during the manufacturing process can be made of fluoropolymers, especially when they need to resist chemicals or maintain purity.
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Seals and Gaskets: Given their chemical resistance and ability to maintain a seal in challenging environments, fluoropolymers are often used to make seals and gaskets for semiconductor manufacturing equipment.
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Fluid Handling Systems: Any system that handles the processing fluids, whether they are aggressive chemicals, deionized water, or ultrapure solvents, can benefit from fluoropolymer components to maintain purity and prevent contamination.
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Protective Coatings: Equipment and tools used in the semiconductor manufacturing process can be coated with fluoropolymers to provide a protective layer against corrosive chemicals, ensuring longevity and maintaining the purity of the process.
In summary, the need to maintain extremely high levels of purity and prevent contamination, combined with the often harsh and reactive chemical environments found in semiconductor manufacturing processes, makes fluoropolymers a material of choice for various applications within the industry.
