Substrates for Optical Micro-Electro-Mechanical Systems (MEMS)

university wafer substrates

Germanium Wafer Optical Switch For Regenerative CO2 Laser Amplifier

A postdoc requested a qutoe for the following:

Thin Germanium Wafer, 3" dia, CA 2.5", 200±3um thick, flatness/ bow < 2um, thickness, uniformity<0.2um
Purpose: optical switch for regenerative CO2 laser amplifier
LightMachinery Inc. Item# OP-7035 Thin Germanium Wafer or its Equivalent:
QTY: 2

Reference # for specs and pricing.

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What is Optical MEMS?

Optical MEMS (Micro-Electro-Mechanical Systems) are miniature devices that combine optical components with micro-scale mechanical elements. These systems are used to manipulate light on a micro-scale and integrate mechanical and optical functions. Applications of Optical MEMS include:

  1. Telecommunications: For switching and routing optical signals in fiber optic networks.Optical MEMS device, showcasing the intricate micro-mechanical components on a silicon chip
  2. Displays: In devices like digital light processing (DLP) projectors, which use micromirrors to project images.
  3. Sensors: For detecting changes in light, such as in environmental monitoring and biomedical diagnostics.
  4. Imaging: In applications like endoscopy and other medical imaging techniques.

Optical MEMS are valued for their precision, small size, and ability to be mass-produced, making them essential in advanced optical and photonic systems.

What Substrates Are Often Used To Fabricate Optical MEMS?

Substrates commonly used to fabricate Optical MEMS include:

  1. Silicon: The most widely used substrate due to its excellent mechanical properties, compatibility with existing semiconductor processes, and cost-effectiveness.

  2. Glass: Often used for its optical clarity and ability to bond with silicon, making it suitable for transparent MEMS components.

  3. Quartz: Known for its high optical quality and stability, making it ideal for applications requiring precise optical performance.

  4. Lithium Niobate (LiNbO2): Used for its electro-optic properties, particularly in applications like modulators and switches.

  5. Gallium Arsenide (GaAs): Employed for its high electron mobility and direct bandgap, making it useful in optoelectronic applications.

  6. Polymers: Sometimes used for flexible and low-cost optical MEMS devices, especially in bioMEMS applications.

These substrates are chosen based on their specific mechanical, optical, and electrical properties, tailored to the requirements of the intended Optical MEMS application.

Row 1 Column 2

  • Micro-Optical Systems and Devices
  • MOEMS Fabrication and Technologies
  • Optical MEMS Sensors
  • Diffractive Optical Microsystems
  • Optical Materials
  • Biomedical Micro-Optical Devices
  • Optical Energy Harvesting
  • Telecommunication Devices
  • MEMS Optical Switch