Silicon Nitride Waveguide

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University Silicon Wafer for Production

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Silicon Nitride Waveguide - Substrates and Services Provided

Clients fabricate SiN waveguides using contact lithography and pattern designs with waveguides with widths varying from 0.8 microns to 2.0 microns each of which has a straight reference waveguides and spiral waveguides with a set of lengths 1, 2, 4 and 8cm for cut-back measurements.

100mm Silicon with 5 micron of wet thermal oxide box layer, PECVD Nitride

We can provide the researcher with:

  • Substrate
  • Thermal Oxide
  • PECVD Nitride