Substrates for Ellipsometry Studies
A postdoc requested a quote for the following:
I would like to order 10 prime grade silicon wafers (N doped) . The radius and the orientation are not big issues. I prefer them to be 4" with low doping level. Please give me a quote as so as possible.
Really I do not know the different types of Si wafers. What I need exactly is to do optical measurements on Silicon wafers using ellipsometry (measuring the refractive index of Si itself and thin films deposited on them). I need clean, smooth, well characterized silicon wafers. I think the prime grade will be great. But your listing does not have prime ones. So, let me know if the mechanical grade is good for optical studies.
Please reference #111236 for Specs/Pricing.
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What is the Benefits of Using Ellipsometry?
Ellipsometry is a non-destructive optical measurement technique used to determine the properties of thin films and surface layers, such as thickness, refractive index, and extinction coefficient. It works by measuring the change in polarization state of light after it reflects off the sample surface. By analyzing the intensity and phase difference of the light in two perpendicular polarizations, information about the optical properties of the sample can be obtained. Ellipsometry is widely used in material science, semiconductor fabrication, and surface analysis.
What Substrates Can Ellipsometry Be Used With?
Ellipsometry can be used on a wide variety of substrates, including metals, semiconductors, insulators, polymers, and thin films. Some common substrates used with ellipsometry include:
- Silicon wafers: used in the semiconductor industry to measure thin film properties on integrated circuits.
- Glass: used in the optical and display industries to measure the thickness and optical properties of thin films.
- Polymer films: used in the materials science industry to study the properties of thin films for applications such as solar cells, organic electronics, and coatings.
- Metals: used in the surface science industry to study the properties of metal films and surfaces for applications such as catalysis and tribology.
The choice of substrate depends on the properties of the thin film being studied and the requirements of the application.
What Substrates Used for Ellipsometry Measurements of Various Thin Films?
A postdoc requested a an answer to the followng questions:
I'm interested in F981, which is 6" SSP highly n doped Si:P wafer. Got a few questions:
- What is "Red Phos"? I want to do ellipsometry measurements of various thin films on Si while having a sufficiently conducting substrate for electrical measurements, will Red Phos cause significant deviation of optical constants compared to "regular" Si?
- Does the comment "Empak cst, 3 csts: 5, 9, 24 wafers" mean I can purchase in quantities of 5, 9, or 24? At what price point?
- You don't seem to have any other 6" Si:P wafer, other than UW6N120, which is test grade. I haven't purchased test grade before, are they suitable for ellipsometry, or do surface imperfections (what kind) or thickness variations cause serious problems?
- Do you do special order for wafer specs that you don't currently have in stock? I assume that will be significantly more expensive?
Answer
- Red phos generally refers to wafers very highly doped with phosphorus. Normally such highly doped wafers are difficult to manufacture because of the explosive nature of phosphorus.
- Yes, you can purchase the wafers in cassette of 5, 9 or 24 wafers at the same price.
- Test grade wafers are generally good for most applications but not good for growing Epi layers.
- Yes, we can do custom wafers. What are the specs you need?
Reference #117543
for specs and pricing.
Gallium Nitride Substrates for Ellipsometric Measurements
The plan is to make ellipsometric measurements of GaN and compare with DFT calculations and literature. He told me that we can do with a piece of a bulk sample if that is an option. He also said that I should offer to share my measurements report when finished.
Referenc #269520 for specs/pricing.
Thermal Oxide and Nitride Used for Ellipsometry Measurements
A scientist requested the following quote:
About 10, 4 inch wafers are preferable. We are looking for a thick oxide layer of optical quality that we will deposit SiN on. So the other specs are not so important. The thickness of the oxide is all we care about, preferably thermal oxide,
The problem is we would like some samples of 4 inch wafers with 200nm, 400nm and 800nm layers of Si3N4.
2 inch would also be acceptable, but 4 is preferable. We can get this deposition done here but it will take a while, so we are interested in pricing the complete wafers as well.
We wish to use the Si3N4 layer to create optical wave-guides, so they need to be good quality and a standard thickness and refractive index. Here's what we want:
5 4inch wafers with Si base, 2um thermal oxide, 200nm Si3N4,
5 4inch wafers with Si base, 2um thermal oxide, 400nm Si3N4,
5 4inch wafers with Si base, 2um thermal oxide, 800nm Si3N4.
The most important properties for us are the thickness of the SiO2 layer, thickness of Si3N4 layer and the refractive index and extinction co-efficient of the Si3N4 layer, for comparison with our theoretical work.
We could go as low as 1um on the thermal oxide thickness, but 2 is preferable. If you could provide ellipsometry measurements of the thickness and optical parameters of the layers, on some of the wafers this would be great. Otherwise we can do this ourselves.
Preferably we would like the oxide to be a thermal oxide, and the Si3N4 layer to be deposited by PECVD or LPCVD,
This is what we would like, can you get back to me with what is possible and we can come to a compromise,
Reference #106570 for specs/pricing.
SIMOX Silicon-on-Insulator Substrates for Ellipsometer Measurements
Simox SOI wafers have been used in ellipsometer measurements.
Client requests:
Do you know what the smoothness of each wafer is? Can the thickness be measured with an ellipsometer? Surface roughness is suppose to be <10 angstroms. I have no idea if the thickness can be measured with and ellipsometer. We use a filmetrics F150.
Reference #113755 for specs and pricing.
N-Doped Silicon Wafers Measurements
A postdoc requested a quote for the following:
I would like to order 10 prime grade silicon wafers (N doped) . The radius and the orientation are not big issues. I prefer them to be 4" with low doping level. Please give me a quote as so as possible.
Really I do not know the different types of Si wafers. What I need exactly is to do optical measurements on Si wafers using ellipsometry (measuring the refractive index of Si itself and thin films deposited on them). I need clean, smooth, well characterized silicon wafers. I think the prime grade will be great. But your listing does not have prime ones. So, let me know if the mechanical grade is good for optical studies.
Reference #111236 for specs and pricing.
Substrates Used for Spin-Cast Polymer Films Experiments
A PhD candidate requested a quote for the following:
We're mostly looking to buy 4 Inch Diameter silicon (100). We are looking for single crystal silicon and is there a score/breakline to show the orientation?
We would be using these wafers as substrates for our ellipsometry to measure the thickness of spin-cast polymer films.
Reference #205977 for specs and pricing.